发明名称 SURFACE TREATING SUPPORT MEMBER, SURFACE-TREATING HOLDER, SURFACE-TREATING PROCESS, AND SURFACE-TREATING APPARATUS
摘要 IN A PROCESS FOR SURFACE-TREATING A PLURALITY OF WORKS, THE SURFACES OF THE WORKS ARE TREATED IN A TREATING CHAMBER, WHILE BEING ROTATED ABOUT THEIR AXES, OR ABOUT A ROTATIONAL AXIS, OR ABOUT THEIR AXES AND ABOUT THE ROTATIONAL AXIS. THE WORKS ARE SUPPORTED IN A SUPPORT MEMBER (10;20) WHICH MAY BE COMPRISED OF AN UPPER CAGE (1A) AND A LOWER CAGE (1B) INCLUDING A LARGE NUMBER OF COMPARTMENTS (3), SO THAT THE CAGES ARE OPENABLY AND THE CLOSABLE IN A LENGTHWISE DIRECTION. THE SUPPORT MEMBER (20) MAY BE COMPRISED OF PLATE-LIKE ELEMENTS (6) OPENABLE AND CLOSABLY FOLDABLE IN A LENGTHWISE DIRECTION, SO THAT A PLURALITY OF NARROW SECTION (9) EACH HAVING A LENGTH CORRESPONDING TO AN INSIDE DIAMETER OF A WORK ARE DEFINED IN OPENED STATES OF THE PLATE-LIKE ELEMENT (6).THE WORK MAY BE SUPPORTED IN A HOLDER (30) WHICH IS FORMED BY CILING A WIRE (11) AT DISTANCES IN SUCH A MANNER THAT IT IS FORMED AS A SRING –LIKE TUBULAR STRUCTURE (13), SO THAT THE WORKS CAN BE ACCOMMADATED IN THE TIBULAR STRUCTURE.A SURFACE TREATING APPARATUS FOR USE IN THE SURFACE.A SURFACE TRAETING APPARATUS FOR USE IN THE SURFACE TREATING PROCESS INCLUDES A TREAEING MATERIAL SOURCE (42) PROVIDED WITHIN A TREATING CHAMBER (40), SO THAT A TREATING MATERIAL RELEASED FROM THE TREATING MATERIAL SOURCE IS DELIVERED TO REACH WORKS FOR A SURFACE TREATMENT,AND A MEANS (50) FOR ROTATING A SUPPORT MEMBER SUPPORTING THE WORKS ABOUT ITS AXIS,OR ABOUT A RATATIONAL AXIS,OR ABOUT ITS AXIS AND ABOUT THE RATATIONAL AXIS . THUS, THE WORKS CAN BE SURFACE-TREATED SIMULTANEOUSLY AND UNIFORMLY,WHILE BEING ROTATED ABOUT THEIR AXES,OR ABOUT THE ROTATIONAL AXIS,OR ABOUT THEIR AXES AND ABOUT THE ROTATIONAL AXIS.
申请公布号 MY139698(A) 申请公布日期 2009.10.30
申请号 MYPI0502784 申请日期 1999.10.01
申请人 HITACHI METALS, LTD. 发明人 YOSHIMI TOCHISHITA;YOSHIO FUJIWARA;YOSHIHIRO ASAGAI;KEN OHTAGAKI
分类号 C23C14/50;H01L21/00;C23C14/24;C23C16/458 主分类号 C23C14/50
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