| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform stable high-precision position measurement of the position of a moving body. <P>SOLUTION: A measurement beam is projected on a scale (diffraction grating) provided on an upper surface of the moving body, and interference light (intensity I) generated by a plurality of diffracted beams generated through the scale is received to measure position information (a phase ϕ associated with displacement ΔY) of a stage relating to a period direction of the diffraction grating. Simultaneously, at least one of the plurality of diffracted beams is received to measure the intensity I<SB>R</SB>thereof or an intensity distribution in a beam section. A measurement result of the intensity I<SB>R</SB>or intensity distribution is used to verify a measurement result of the position information and further to correct a measurement error. <P>COPYRIGHT: (C)2010,JPO&INPIT |
