FLUID TRANSPORT APPARATUS AND METHOD OF MANUFACTURING OPTICAL FILM

摘要

PROBLEM TO BE SOLVED: To efficiently form a coating film uniform in thickness on a substrate.

SOLUTION: The fluid transport apparatus is provided with: a discharge means 10 for discharging a coating liquid on a substrate; a first storage means 20 for storing the coating liquid supplied to the discharge means; a second storage means 30 for storing the coating liquid sent to the first storage means; a pressurizing means 50 for pressurizing the inside of the first storage means and the inside of the second storage means; and a ventilation means 60 for communicating the inside of the first storage means and the inside of the second storage means with each other.

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