| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate height measuring system, capable of measuring the height of a substrate in a wide range, and to provide an electronic component mounting apparatus and a substrate height measurement method. <P>SOLUTION: The substrate height measurement system includes: an irradiation device for irradiating a light to a measurement area A1, in a predetermined position on the upper surface of a substrate 9 and forming a figure S1 in the measurement area A1; an imaging device for taking an image of an imaging area B1, including the measurement area A1 from a direction intersecting the irradiating direction of the light; and an image processing device for processing the image data of the imaging area B1 and measuring the height of the figure S1, based on the position of the image S1 in the image measurement area A1. When the figure S1 is not formed in the measurement area A1, the substrate height measurement system moves the figure S1 and the imaging area B1, relative to the measurement area A1, by a predetermined amount so that the figure S1 is placed in the measurement area A1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
