| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain an X-ray inspection device capable of properly dealing with the lowering problem of a detection capacity caused by polarization without stopping the operation of a production line on the assumption that a direct conversion type X-ray sensor is used. <P>SOLUTION: The X-ray inspection device 1 includes an X-ray irradiation part 7, an X-ray detection part 8 having the X-ray sensor of a type which directly converts X rays to an electric signal, a belt conveyor 6 for feeding an article 12 so that the article 12 passes through the X-ray irradiation region 100 between the X-ray irradiation part 7 and the X-ray detection part 8 and a control part 60 for controlling the bias voltage applied to the X-ray sensor. The X-ray detection part 8 has the X-ray line sensor 8A arranged on the feed route of the article 12 and the X-ray line sensor 8B arranged in parallel to the X-ray line sensor 8A on the downstream side of the X-ray line sensor 8A. The control part 60 can independently apply bias voltage to the X-ray line sensors 8A and 8B. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
