| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate measuring device of an inexpensive cost by enabling high precision and high resolution flow rate measurement. <P>SOLUTION: The flow rate measuring device includes: phase shift oscillation circuits (1, 3) having a heater (33) arranged on a flow passage of fluid of a measured object and a temperature sensor (35) arranged in a downstream side by being spaced from the heater (33) in a flow direction of the fluid in the flow passage and for being oscillated by including a flow sensor (3) as a phase shift circuit, reversing and amplifying output of the temperature sensor (35) with an amplifying means (1), and performing feedback to the heater (33); a frequency measuring means (5) for measuring the frequency of oscillation output outputted from the phase shift circuits (1, 3); and a flow rate calculation means (5) for being calculated in the flow rate of the fluid based on the frequency measured with the frequency measuring means (5). <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
