| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a degradation of durability by preventing a secular reduction of hydrophobic agent consistency in gaps even when the sealability of an atmospheric air release hole (hydrophobic agent introducing hole) of an electrostatic actuator is not perfect. Ž<P>SOLUTION: While a hydrophobic film is formed on the surface of a gap side 15a between an oscillating board 20 and a fixed electrode 13a and the steam of the hydrophobic agent having a hydrophobic group is enclosed into the gap 15a, a hydrophobic agent hold part 52 is provided for holding the hydrophobic agent of liquid in contact with a communication conduit 53 which communicates with the gap 15a. Even if the sealing of the steam of the hydrophobic agent in the gap 15a is slightly imperfect, the hydrophobic agent steam is supplied from the hydrophobic agent hold part 52 which holds the hydrophobic agent of liquid, so that the reduction of the hydrophobic agent consistency in the gap 15a can be prevented as well as the degradation of durability of the electrostatic actuator. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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