| 摘要 |
PROBLEM TO BE SOLVED: To prevent leak of heat from the surroundings of a furnace mouth, temperature rise of the surroundings of the furnace mouth, and contamination by deteriorated high heatproof heat insulation member, and to use the horizontal furnace also for heat treatment at high temperature. SOLUTION: The horizontal furnace 10 is provided with: a process tube 1; a heater 2; supports 3, 4; and high heatproof heat insulation members 6-8. The process tube 1 is provided with a leading pipe 15 on a second end surface 12. Each of the supports 3, 4 presents the annular shape, and heat insulation members 21, 22 of the heater 2 are externally fitted for all circumference. Gaps between the supports 3, 4 and the process tube 1, and between the leading pipe 15 and the outer circumferential surface are blocked by a first high heatproof heat insulation member 5 and the second high heatproof heat insulation member 6. The second support 4 consists of a first member 41 and a second member 42 fitted into the first member 41. A fourth high heatproof heat insulation member 8 is arranged for all circumference between the first member 41 and the second member 42. The heat between the process tube 1 and the heater 2 does not leak from both ends of the process tube 1 to the outside. COPYRIGHT: (C)2010,JPO&INPIT |
