TWO BIT U-SHAPED MEMORY STRUCTURE AND METHOD OF MAKING THE SAME

摘要

<P>PROBLEM TO BE SOLVED: To provide a two bit memory structure having floating gates with a U-shaped bottom and a method of making the two bit memory structure. Ž<P>SOLUTION: The memory structure includes: a substrate 50; a control gate 70 positioned on the substrate 50; a plurality of floating gates 74 positioned at two sides of the control gate 70, wherein the floating gates have a U-shaped bottom 57 embedded in the substrate 50; a first dielectric layer 52 positioned between the control gate 70 and the substrate 50; a second dielectric layer 62 positioned between the U-shaped bottom of the floating gates 74 and the substrate 50; a third dielectric layer 68 positioned between the control gate 70 and the floating gates 74; a local doping region 58 positioned around a floating gate channel 80; and a source/drain doping region 76 positioned in the substrate 50 at a side of the floating gates 74. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž