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经营范围
发明名称
Gas eliminator for semiconductor facility using electric force
摘要
申请公布号
KR100923951(B1)
申请公布日期
2009.10.29
申请号
KR20080037639
申请日期
2008.04.23
申请人
发明人
分类号
B03C3/40;B03C3/08
主分类号
B03C3/40
代理机构
代理人
主权项
地址
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