发明名称 DUAL-PURPOSE PERTURBATION ENGINE FOR AUTOMATICALLY PROCESSING PATTERN-CLIP-BASED MANUFACTURING HOTSPOTS
摘要 One embodiment of the present invention provides a system that automatically processes manufacturing hotspot information. During operation, the system receives a pattern clip associated with a manufacturing hotspot in a layout, wherein the pattern clip comprises a set of polygons in proximity to the manufacturing hotspot's location. Next, the system determines if the pattern clip matches a known manufacturing hotspot configuration. If the pattern clip does not match a known manufacturing hotspot configuration, the system then performs a perturbation process on the pattern clip to determine a set of correction recommendations to eliminate the manufacturing hotspot. By performing the perturbation process, the system additionally determines ranges of perturbation to the set of polygons wherein the perturbed pattern clip does not eliminate the manufacturing hotspot. Subsequently, the system stores the set of correction recommendations and the ranges of perturbation into a manufacturing hotspot database.
申请公布号 US2009268958(A1) 申请公布日期 2009.10.29
申请号 US20080275887 申请日期 2008.11.21
申请人 SYNOPSYS, INC. 发明人 KWANG KENT Y.;ZHANG DANIEL;TANG ZONGWU;SINHA SUBARNAREKHA
分类号 G06K9/00 主分类号 G06K9/00
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