| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus in which ideal beam branching is possible and in which inter-beam pitch is arbitrarily adjustable, and also to provide a pitch adjusting method of a laser beam and a laser beam machining method. <P>SOLUTION: The laser beam machining apparatus includes a laser beam branching means 21, condensing lenses 22, 23, and an image rotator 24. A single laser beam oscillated from a laser beam oscillator 20 is branched into a plurality of beams, which are emitted to the surface of a workpiece 26 to perform linear machining thereon. In the apparatus, an image rotator is rotated around the optical axis of the beam and, by adjustment of the rotation angle, the pitch spacing of the beam outgoing from the image rotator is adjusted. The invention includes the pitch adjustment of a laser beam by this machining apparatus and the laser beam machining of a workpiece surface using this machining apparatus. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
