| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor capable of suppressing the decrease in the detection accuracy. <P>SOLUTION: The flow sensor comprises: a flow rate detection chip 10, where a flow rate detection section is formed in a thin section 11, on a substrate having the thin section 11; a support member 20, including a mount surface 23 that supports the flow rate detection chip 10 mounted on the mount surface, which is mounted with the chip 10 and a surrounding section 21a that is provided, while projecting from the mount surface 23 around the flow rate detection chip 10 and is substantially flush with a surface 12, where the flow detection section is formed; and an adhesive sheet 70 for fixing the flow rate detection chip 10 and the support member 20. A region (non-adhesive region 71) which does not adhere to at least one portion is provided between the adhesive sheet 70 and the support member 20. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
