| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator which attains improvement of an electric responsiveness of each electrostatic actuator by shortening a charging time between electrostatic actuator electrodes to have a low resistance, and to provide a liquid droplet delivering head, a liquid droplet delivering apparatus and a method for manufacturing the liquid droplet delivering head. Ž<P>SOLUTION: The liquid droplet delivering head 1 is equipped with a nozzle substrate 2 which is composed of a metal material and includes a plurality of nozzle holes 8 formed therein, a cavity substrate 3 whose bottom wall forms a diaphragm 6 and which is formed with ink pressure chambers 5 for storing and delivering a liquid and is joined to the nozzle substrate 2, and an electrode substrate 4 which is formed with individual electrodes 7 oppositely via a gap 21 to the diaphragm 6 to drive the diaphragm 6 and is joined to an opposite side of the nozzle substrate 2 of the cavity substrate 3. The nozzle substrate 2 is made to function as a common electrode terminal, whereby an electric current is supplied from the whole surface of the nozzle substrate 2 to the cavity substrate 3 which functions as a common electrode. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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