| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern inspection device for enabling the verification based on an image containing the data related to the shape in the thickness direction of a wiring pattern. Ž<P>SOLUTION: (A) and (B) respectively show the two-dimensional image of reflected light and the two-dimensional image of transmitted light and (C) shows a synthetic image displayed by superposing both images one upon another. Since wiring patterns P1r, P2r and P3r and wiring patterns P1t, P2t and P3t are different in width from each other, the intermediate regions held between the contours of P1r, P2r and P3r and the contours of P1t, P2t and P3t can be clearly visually confirmed in the synthetic image (C). Since the images of the intermediate regions show the shapes of the oblique surfaces in the wiring patterns forming a trapezoidal cross section, the detection of the wiring patterns such as shorts f1, breaks f2 or the like can be performed in an extremely easy manner by the visual observation of the intermediate regions. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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