| 摘要 |
PROBLEM TO BE SOLVED: To install a hoop and an open cassette in a load port without using an adapter, to identify the hoop or open cassette without providing a substrate container identification sensor, and to use even an open cassette which is equal in number of slots and slot pitch to the hoop. SOLUTION: A clamp means for a container is lowered below a position when a bottom surface of the hook K1 is fixed, and further is lowered to a position where the open cassette K2 does not come into contact with a bottom surface of the open cassette K2 when the open cassette K2 is mounted on a stage. COPYRIGHT: (C)2010,JPO&INPIT
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