发明名称 WORKING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a working device capable of securing space in a device, and simplifying a mechanism in the device. <P>SOLUTION: The working device has: a cassette 7 for storing a ring frame where a work is supported by an opening via a pressure-sensitive adhesive tape; a carry-out means 11 for carrying out a ring frame in the cassette 7 to a region for placing the frame temporarily; a holding means 14 for holding the work supported by the ring frame; and a working means for working the work. In the working device, at a region 3 for placing the frame temporarily, a positioning device 10 is provided, which has frame guide rails 12a, 12b in which the ring frame is placed and a guide rail drive means 13 for positioning the frame guide rails 12a, 12b to open and clamped states, a holding surface 15 of the holding means 14 is arranged in an area directly below the region between the frame guide rails 12a, 12b, and the holding surface 15 can be elevated to a position on the rear of the work 20 or higher by a lifting means 16. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009253226(A) 申请公布日期 2009.10.29
申请号 JP20080102822 申请日期 2008.04.10
申请人 DISCO ABRASIVE SYST LTD 发明人 HIGAKI TAKEHIKO;OMIYA NAOKI
分类号 H01L21/677;B65G49/07;H01L21/301 主分类号 H01L21/677
代理机构 代理人
主权项
地址