CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION TECHNIQUE USING CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To obtain such images that can make selection of each contrast or color a diffraction contrast part to clearly display it, by distinguishing diffraction contrast and Z contrast from dark-field signal images formed by dark-field signal particles transmitting inside a sample in dispersion, in a charged particle beam device. SOLUTION: An image processing device with dark-field detectors divided into a plurality of numbers and memories for making the detectors store images is provided that can recognize diffraction contrast detected in a specific direction from a plurality of sheets of images obtained from the divided detectors as well as Z contrast scattered in a uniform direction, and make selection of each contrast as well as clearly display diffraction contrast parts by coloring the same. COPYRIGHT: (C)2010,JPO&INPIT