| 摘要 |
An apparatus and a method for improving bandwidth of a fine positioning mechanism in data storage manufacturing and test equipment that require fine positioning of a head on or about a track. The method comprises the steps of sensing separate sources of mechanical disturbance that mis-position the head with one or more non-contact position sensors, generating a compensating position control signal from one or more input signals, and positioning the head with a fine positioning mechanism and position control signal. The apparatus uses a shear mode micro-actuator as a fine positioning mechanism.
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