| 摘要 |
<p>PURPOSE: A position control system, a lithography device, and a method for controlling a position of a movable object are provided to improve a reaction time and accuracy of a position control system. CONSTITUTION: A position control system controls a position of a movable object, and includes a comparator, a controller, a feed-forward device(FF), an actuator, and a compliance compensator. The comparator provides an error signal. The controller provides a control signal based on the error signal. The feed-forward device provides a feed-forward signal based on a first signal related to a desired position. The actuator is operated on the movable object based on the control signal and the feed-forward signal. The compliance compensator provides a compliance compensation signal.</p> |
