| 摘要 |
PURPOSE: An apparatus for cleaning a substrate having a window is provided to prevent the unclear of a window due to the splash of cleaning solution to the window. CONSTITUTION: An apparatus for cleaning a substrate having a window is composed of a first transparent plates, a second transparent plates, a first purge unit, and a second purge unit. The first transparent plates are equipped on the internal wall based on a chamber wall(110). The second transparent plates are equipped at the external wall based on the chamber wall while facing the first transparent plate. A first purge spray the purge gas within a cavity(111). The second purge unit spray the purge gas on the first transparent plates while being equipped within the chamber(112).
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