| 摘要 |
<P>PROBLEM TO BE SOLVED: To calibrate position measurement precision and driving precision of a moving body by calibrating fitting positions of a plurality of sensor heads measuring the position of a moving body. <P>SOLUTION: The plurality of sensor heads for measuring the position of a stage WST moving in a predetermined plane, for example, Y heads 64 and 65 for measuring a Y position of the stage WST and Z heads 74 and 76 for measuring a surface position of an upper surface of the table WTB are disposed opposite the upper surface of the stage WST. In order to calibrate the fitting positions of the individual sensor heads, a coordinate connecting method is implemented for the sensor heads (Y head 65 and Z head 76) belonging to the same series (for example, a series 62A), and the origin of measured values is reset. This calibrating procedure is suitably implemented when an exposure device is started, for a first lot, etc., to calibrate the measurement precision of the sensor heads, thereby guaranteeing high stage driving control. <P>COPYRIGHT: (C)2010,JPO&INPIT |
