| 摘要 |
PROBLEM TO BE SOLVED: To achieve, in a laminating apparatus having a plurality of laminating units, miniaturization of the laminator and improvement of the workpiece production efficiency. SOLUTION: The laminating apparatus has the plurality of laminating units 10 in the vertical direction which are composed of an upper chamber 13a and a lower chamber 11a and perform the laminating treatment by arranging a workpiece on a hot plate 11b installed on the lower chamber 11a and pinching/pressing the workpiece heated with the hot plate 11b between the hot plate 11b and a pressing member 13b installed on the upper chamber 13a. The plural laminating units 10 perform the laminating treatment independently from each other. COPYRIGHT: (C)2010,JPO&INPIT |
