| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable high-precision and high-speed pattern inspection by a small processing capacity. Ž<P>SOLUTION: The pattern inspection apparatus computes a statistics value showing a degree of a gap in matching an image of an inspection object pattern and CAD data corresponding to the inspection object pattern, determines the necessity of correction processing based on the statistics value, performs correction processing onto a polygon figure in the CAD data when it is determined that correction processing is required, and compares the polygon figure been corrected with the pattern image. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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