| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring device capable of accurately measuring the wave front of a detection object optical system. Ž<P>SOLUTION: A pupil imaging optical system 14 and an imaging element 16 are set movable along an optical axis OA, in a Talbot interferometer; the pupil imaging optical system 14 calculates a system error, while conjugating a diffraction grating 12 with an imaging surface of the imaging element 16; and the pupil imaging optical system 14 calculates the waves from before the correction of the detection object optical system L, while conjugating the detection object optical system L with the imaging surface of the imaging element 16. A computer 4 corrects the wave front of the detection object optical system L, by subtracting the system errors from the wave front of the optical system L. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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