A pressure control system includes a digital communication network between a pressure sensor and a pressure controller. The digital communication network is configured to communicate signals between the pressure sensor and the pressure controller. The pressure sensor is configured to measure pressure within a vacuum chamber in a processing tool. The pressure controller is responsive to pressure measurements made by the pressure sensor and communicated to the pressure controller through the digital communication network, to control the pressure within the vacuum chamber so as to maintain the pressure in the vacuum chamber at a pressure set point received from the tool.
申请公布号
WO2008109496(A3)
申请公布日期
2009.10.29
申请号
WO2008US55610
申请日期
2008.03.03
申请人
MKS INSTRUMENTS. INC;CHAMBERLAIN, DAVID;GOLDMAN, DAVID, J.;HILL, GORDON
发明人
CHAMBERLAIN, DAVID;GOLDMAN, DAVID, J.;HILL, GORDON