发明名称 HEAT DISSIPATION STRUCTURE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a heat dissipation structure excellent in heat dissipation performance by forming a carbon nanotube layer contacted vertically to the partner material on a metal substrate except a SiC substrate to make the heat dissipation structure of good radiation performance cheaper. Ž<P>SOLUTION: The method for manufacturing the heat dissipation structure includes a first process to form a carbon nanotube deposited layer being as a main composition on the surface of the substrate and a second process to extrude the top of carbon nanotube near the surface of substrate at least to contact with the partner material from the carbon nanotube deposited layer and to orient the lengthwise direction of carbon nanotube to direct in the direction vertical to the substrate surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009253123(A) 申请公布日期 2009.10.29
申请号 JP20080100996 申请日期 2008.04.09
申请人 SUMITOMO ELECTRIC IND LTD 发明人 KAWAI CHIHIRO
分类号 H01L23/36;H01L23/373 主分类号 H01L23/36
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