SINTERED BODY FOR VACUUM VAPOR DEPOSITION

摘要

A sintered body for vacuum vapor deposition, the sintered body being a sintered body of an oxide containing at least one cation element; the cation element having an electronegativity of 1.5 or more; and the sintered body having a surface roughness of 3 mum or less and a bulk resistance of less than 1x10-1 Omega.cm.