发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device in a semiconductor device provided with electrical fuses. SOLUTION: A semiconductor device 1 has a semiconductor substrate (not illustrated in the diagram) and a first electrical fuse 12 and a second electrical fuse 13, which are provided on the semiconductor substrate. The first electrical fuse 12 has a first upper layer wire 121 and a first lower layer wire 122 formed in different wire layers, and a via 123 for connecting the first upper layer wire 121 to the first lower layer wire 122. The second electrical fuse 13 has a second upper layer wire 131 and a second lower layer wire 132 formed in different wire layers, and a via 133 for connecting the second upper layer wire 131 to the second lower layer wire 132. The semiconductor device 1 has a connection portion 14 for connecting the first upper layer wire 121 of the first electrical fuse 12 to the second lower layer wire 132 of the second electrical fuse 13. The connection portion 14 connects the first electrical fuse 12 and the second electrical fuse 13 in series. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009252870(A) 申请公布日期 2009.10.29
申请号 JP20080096918 申请日期 2008.04.03
申请人 NEC ELECTRONICS CORP 发明人 TSUDA KOJI
分类号 H01L21/82;H01L21/768 主分类号 H01L21/82
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