METHOD FOR MANUFACTURING SILICON NANO-STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing silicon nano-structure.

SOLUTION: The method for manufacturing silicon nano-structure includes: a first step of providing a growing device comprising a heating furnace and a reacting room; a second step of providing a catalyst material and a growing substrate and placing the catalyst material and the growing substrate separately in the reacting room; and a third step of introducing a silicon-containing gas and hydrogen gas into the reacting room and heating the reacting room to 500-1,100°C to thereby grow silicon nano-structure on the growing substrate.

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