发明名称 DISCHARGE LAMP FOR ULTRAVIOLET RAYS, AND LAMP UNIT HAVING THIS
摘要 PROBLEM TO BE SOLVED: To provide an excimer lamp which prevents deterioration of phosphor of an optical sensor due to moisture and ozone and is capable of preventing fluctuations of ultraviolet rays due to atmosphere entered the optical sensor, and to provide a lamp unit having the excimer lamp. SOLUTION: The discharge lamp for ultraviolet rays 5 is composed of a discharge container 51 made of a dielectric having a discharge space 54 filled with luminescent gas and electrodes 52, 53 which are opposed to the discharge container 51 through the discharge space 54. A fluorescent glass 56 which converts the ultraviolet rays received into visible light is installed in an arbitrary region of the discharge lamp for ultraviolet rays 5, where effect of fluctuations of gas atmosphere in the surrounding of the discharge lamp for ultraviolet rays 5 is not exerted. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009252546(A) 申请公布日期 2009.10.29
申请号 JP20080099232 申请日期 2008.04.07
申请人 USHIO INC 发明人 ENDO SHINICHI;HISHINUMA NOBUYOSHI
分类号 H01J65/00;B01J19/12;H01L21/304 主分类号 H01J65/00
代理机构 代理人
主权项
地址