| 发明名称 |
METHOD AND APPARATUS FOR PRODUCING SMALL STRUCTURES |
| 摘要 |
The present invention relates to a method for producing small structures includes: depositing a mask on a surface of a substrate; and evaporating a source material under such evaporation condition performed at such pressure to form a layer onto both a shadowed surface area and a non-shadowed surface area of the mask and the substrate.
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| 申请公布号 |
US2009269558(A1) |
申请公布日期 |
2009.10.29 |
| 申请号 |
US20070441680 |
申请日期 |
2007.09.21 |
| 申请人 |
HIMMELHAUS MICHAEL;WORSFOLD OLIVER;WHITEHOUSE CONOR D |
发明人 |
HIMMELHAUS MICHAEL;WORSFOLD OLIVER;WHITEHOUSE CONOR D. |
| 分类号 |
B32B3/10;B05D1/32;C23C14/04;C23C14/24 |
主分类号 |
B32B3/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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