MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR

摘要

Provided is a meandering oscillator composed of a plurality of oscillating plates which are bent to return in prescribed directions and connected; and a piezoelectric actuator having a lower electrode, a piezoelectric body and an upper electrode which are laminated in this order on the oscillating plate. In the meandering oscillator, piezoelectric actuators are arranged on every other oscillating plate on the oscillating plates. Thus, even when the element is reduced in sizes, electrode layout is facilitated, and as a result, productivity is improved.