发明名称
摘要 A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
申请公布号 JP2009537975(A) 申请公布日期 2009.10.29
申请号 JP20090510392 申请日期 2007.04.25
申请人 发明人
分类号 H01L21/3205;H01L21/28;H01L21/8234;H01L23/52;H01L27/08;H01L27/088;H01L27/12;H01L29/786 主分类号 H01L21/3205
代理机构 代理人
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