| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent failures of an electronic part or the like by monitoring the time deterioration state of a gas phase adsorbing filter set within a casing or container in real time by a sensor. Ž<P>SOLUTION: A sensor element of a QCM (quartz crystal microbalance) is mounted in the vicinity of the gas phase adsorbing filter of silica gel or activated carbon installed within the casing to temporarily measure the gas phase material adhesion accumulation quantity to the sensor, whereby a correlation database with a preliminarily acquired temporal accumulative adsorption quantity of the gas phase material to the filter corresponding thereto is used to estimate the accumulative adsorption quantity of the gas phase material to the installed filter in real time, and further the deterioration state of the filter performance can be warned. Consequently, failures of the electronic part or an electronic device mounted therewith resulting from overlooking of deterioration of the gas phase filter can be prevented. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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