| 摘要 |
A substrate container has a container main body to contain a substrate and a check valve which has a cylindrical housing and a valve disc installed in the housing and controls gas flowing from and to the interior and the exterior of the container main body, and is formed by inserting the housing into a through-hole of the container main body. When an end of the valve located inside the container main body is defined as a front end, a check valve has a fixing ring that is mounted on the rear end side in the manner of being rotatable relative to the housing and fixes the housing to the container main body from rearward, the housing has a first housing installed on the front end side and a second housing inserted into the first housing at the front end and attached to the first housing, the first housing has a fixing piece protruding rearward from the rear end and a fixing claw being formed at the rear end of the fixing piece and fixing the fixing ring, the fixing ring has a cylindrical sidewall mounted outside the first housing and a flange protruding outward from the sidewall, and on the inner circumferential face of the sidewall, a guide recess extending in the axial direction and guiding the fixing claw, a detent protruding inward and abutting on the fixing piece, and a hook bent from the detent in the circumferential direction and locked to the fixing piece are installed.
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