发明名称 ULTRAVIOLET IRRADIATOR, AND CONTROL METHOD OF IRRADIATOR THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide an ultraviolet irradiator combining a water-cooling ultraviolet lamp and feedback control and preventing dispersion of lamp lifetime caused by the dirt of cooling water; and a control method of the irradiator. <P>SOLUTION: This ultraviolet irradiator includes the ultraviolet lamp having a pair of oppositely arranged electrodes, an optical sensor provided outside the ultraviolet lamp, a lamp power source which supplies electric power to the pair of electrodes, and a control part which controls the lamp power source based on the light quantity received at the optical sensor. A jacket constituting a flow channel of the cooling water is provided between the ultraviolet lamp and the optical sensor. A resistivity meter or a conductivity meter is provided in the flow channel. The control part performs control based on the specific resistance measured by the resistivity meter or the conductivity meter. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009251551(A) 申请公布日期 2009.10.29
申请号 JP20080103110 申请日期 2008.04.11
申请人 USHIO INC 发明人 YAGYU HIDEAKI;MORI KAZUYUKI
分类号 G03F7/20;H01J61/52;H01L21/027 主分类号 G03F7/20
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