| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve miniaturization of an inertial sensor. <P>SOLUTION: This inertial sensor comprises a drive circuit section 11A for outputting a drive signal, a detection element 12 for receiving the drive signal from the drive circuit section 11A, a detection circuit section 13A for fetching a response signal from the detection element 12, and an operation circuit section 14A that receives the response signal from the detection circuit section 13A and separates the response signal into a monitor signal and a sense signal. The drive circuit section 11A adjusts an oscillation amplitude of the drive signal in accordance with the monitor signal. The inertial sensor further comprises a failure diagnosis circuit 15 electrically connected to at least one of the drive circuit section 11A, detection circuit section 13A and operation circuit section 14A, and an output circuit section 16 for digitally outputting a failure diagnosis signal from the failure diagnosis circuit 15 and the sense signal from the operation circuit section 14A in a time sharing manner. <P>COPYRIGHT: (C)2010,JPO&INPIT |
