摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical characteristics measuring device, capable of accurately measuring optical characteristics of a phase change film in a molten state, without accompanying loss or degradation of material. <P>SOLUTION: A thin-film sample 107 includes a phase change film which phase-changes from a solid phase to a molten phase, and a protective film laminated on the phase change film. A heater 108 heats the thin-film sample 107 so as to give a temperature difference between a central part and a peripheral part of the thin-film sample. The phase change film inside the thin-film sample 107 is phase-changed to the molten phase in an area which is larger in diameter than the light of a measuring beam 113, and is maintained in solid phase in the peripheral part thereof. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |