发明名称 OPTICAL CHARACTERISTICS MEASURING DEVICE AND MEASURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an optical characteristics measuring device, capable of accurately measuring optical characteristics of a phase change film in a molten state, without accompanying loss or degradation of material. <P>SOLUTION: A thin-film sample 107 includes a phase change film which phase-changes from a solid phase to a molten phase, and a protective film laminated on the phase change film. A heater 108 heats the thin-film sample 107 so as to give a temperature difference between a central part and a peripheral part of the thin-film sample. The phase change film inside the thin-film sample 107 is phase-changed to the molten phase in an area which is larger in diameter than the light of a measuring beam 113, and is maintained in solid phase in the peripheral part thereof. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009250915(A) 申请公布日期 2009.10.29
申请号 JP20080102204 申请日期 2008.04.10
申请人 NEC CORP 发明人 ETO DAISUKE;AOKI KAZUHIKO;OKUBO SHUICHI
分类号 G01N25/02;G01N21/17;G01N21/55;G11B7/26 主分类号 G01N25/02
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