摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor light-receiving element equipped with a mesa-structure protruding from a semiconductor substrate, which can prevent time deterioration of a light-absorbing layer because of oxidation and the like. SOLUTION: The semiconductor light-receiving element is provided with: the semiconductor substrate 1, and the mesa-structure 20 protruding from the semiconductor substrate 1. The mesa-structure 20 has a light-absorbing layer 3, a multiplying layer 5 of an electron multiplying type, and a contact layer 7 narrower than the multiplying layer 5, which are laminated in this order from the semiconductor substrate 1. COPYRIGHT: (C)2010,JPO&INPIT |