COMPOSITION OF PASSIVATION AND SPUTTERING TARGET AND PASSIVATION MEMBRANE AND MANUFACTURING METHOD OF IT

摘要

PURPOSE: A composition of passivation, sputtering target, passivation membrane, and a manufacturing method thereof are provided to protect food contents against moisture and oxygen for a long period. CONSTITUTION: A composition of passivation is composed of 10-90 atomic weight% SiO2 and 90-10 atomic weight% ZnO. A passivation membrane is formed on top of a glass substrate or polymer substrate. The passivation membrane comprises 10-90 atomic weight% SiO2 and 90-10 atomic weight% ZnO. A method for manufacturing the passivation membrane comprises the following steps of: depositing the target or pellet comprising 10-90 atomic weight% SiO2 and 90-10 atomic weight% ZnO on an organic substrate or polymer substrate; and sputtering the deposited target or pellet to form the passivation membrane.