| 摘要 |
PURPOSE: A screw type vacuum pump with improved cooling performance is provided to extend the service life of a vacuum pump by cooling the heat generated by the high speed rotation of the screw as well as the air compression heat. CONSTITUTION: A screw type vacuum pump, which discharges the gas pumped by the engagement and rotation of a pair of screws(5) from an inlet to an outlet(11), comprises a path, a casing, a front cover, an intermediate cover, and a rear cover. The path is formed through the inside of the screw. The casing(1) is formed outside of the screw. The front cover(2) is formed on the front side of the casing. The intermediate cover(4) and the rear cover(3) are formed on the rear side of the casing. A cooling gas or oil circulates through the path so that the heat generated by the screw is cooled. A first coolant chamber(9) is formed within the casing to cool the heat generated by compression of gas. A second coolant chamber(10) is formed in the intermediate cover to cool the heat of a bearing(8) generated by the rotation of a shaft(6). |
