| 摘要 |
5-Methylene-1,3-dioxolan-4-one derivatives represented by the general formula (1), which are novel monomers capable of giving homo-and co-polymers excellent in light transmission and thermal stability. Polymers obtained by (co)polymerizing a monomer composition containing a derivative represented by the general formula (1) are excellent in resist performances such as sensitivity, resolution and dry etching resistance, and solubility in organic solvents and are reduced in line edge roughness, thus being useful as resins for resist compositions. (1)[In the general formula, R1 is a bridged cyclic hydrocarbon group having 4 to 16 carbon atoms, or the like; and R2 is hydrogen or the like.]
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