| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry-Perot filter reduced in the number of multilayer optical thin film layers, easy in manufacturing and easy in positioning to an optical fiber. SOLUTION: The Fabry-Perot filter is provided with a fixed mirror and a moveable mirror which is oppositely arranged with respect to the fixed mirror with a variable size gap and light beams having any desired wavelength corresponding to the gap are selected and passed. The fixed mirror is formed by photoetching a single crystal silicon layer on an SOI substrate on which a single crystal silicon layer is formed on a single crystal silicon substrate through an insulation film. The moveable mirror is formed by photoetching an insulation film and a single crystal silicon layer on an SOI substrate so that the mirror is floated from the substrate and formed in a hollow beam shape. The moveable mirror is oppositely arranged with respect to the fixed mirror along the surface direction of the substrate and the moveable mirror is driven along the surface direction of the substrate and the gap is made variable. COPYRIGHT: (C)2004,JPO&NCIPI |
