PIEZOELECTRIC MICRO POWER GENERATOR AND ITS MANUFACTURING METHODS

摘要

PURPOSE: A piezoelectric micro power generator and its manufacturing method are provided to solve the power problem through the electric power generating element. CONSTITUTION: The cantilever(11) generates the electric charge by the external force. The electrode(12) is formed in the cantilever and the generated electric charge is collected. The weight plumb(13) drops the resonant frequency of a cantilever. The piezoelectric thin film is organized by the piezoelectric. The weight plumb is formed in the cantilever end to maximize the deformation of a cantilever by the external force. The oxide film or the metal layer is evaporated on the elastic thin film. The piezoelectric thin film is evaporated on the formed oxide film or the metal layer.