,申请号JP20030168531-传众专利搜索

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发明名称
摘要
申请公布号	JP4353405(B2)	申请公布日期	2009.10.28
申请号	JP20030168531	申请日期	2003.06.12
申请人		发明人
分类号	C23C16/42;H01L21/31;H01L21/316	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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