CURVED MOLD HAVING MINUTE PATTERN AND METHOD FOR FABLICATING THEREOF
摘要
<p>PURPOSE: A non-planar mold and a manufacturing method thereof are provided to manufacture the micro-pattern on the non-planar mold body in a nano size. CONSTITUTION: A non-planar mold having a micro-pattern and a manufacturing method thereof include the step of forming a photoresist layer on the planar substrate(S101); the step of exposing the photoresist layer(S102); the step of developing the photoresist layer(S103); the step of etching the substrate in order to form the micro-pattern with nano size on the substrate(S104); the step of removing the remaining photoresist layer(S105); the step of adhering the substrate to the mold body which has a non-planar(S106).</p>
