APPARATUS FOR GUIDING A WAFER RING

摘要

PURPOSE: An apparatus for guiding a wafer ring is provided to shorten the time to be required to a gaping between guide rails by easily replacing the guide rail. CONSTITUTION: An apparatus for guiding a wafer ring includes a support(110), a stationary guide rail(120), and an arrangement guide rail(130). The support is arranged to be adjacent to the transfer path of the wafer ring. The stationary guide rail is arranged on the support and is extended parallel to the transfer path of wafer ring, and guides one side edge site of wafer ring. The arrangement guide rail is arranged on the support to be faced with the stationary guide rail and guides the other side edge site of a wafer ring. The arrangement guide rail applies the elastic force to the wafer ring.