| 摘要 |
<p>PURPOSE: An alignment key is provided to improve the manufacturing yield of element by preventing the generation of bridge. CONSTITUTION: An alignment key includes the first sort key body(10) and the second sort key body(20). The first alignment key bodies include the first substances which are adjacently arranged. The second alignment key body includes the second materials and is filled between the first alignment key bodies. The first alignment key body and the second alignment key body have the each other dissimilar etching selectivity.</p> |
