APPARATUS OF CLEANING A SUBSTRATE,申请号KR20070100884-传众专利搜索

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发明名称	APPARATUS OF CLEANING A SUBSTRATE
摘要
申请公布号	KR100923686(B1)	申请公布日期	2009.10.28
申请号	KR20070100884	申请日期	2007.10.08
申请人		发明人
分类号	H01L21/304;H01L21/02;H01L21/677	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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